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general description the max9951/max9952 dual parametric measurement units (pmus) feature a small package size, wide force and measurement range, and high accuracy, making the devices ideal for automatic test equipment (ate) and other instrumentation that requires a pmu per pin or per site. the max9951/max9952 force or measure voltages in the -2v to +7v through -7v to +13v ranges, dependent upon the supply voltage (v cc and v ee ). the devices handle supply voltages of up to +30v (v cc to v ee ) and a 20v device-under-test (dut) voltage swing at full current. the max9951/max9952 also force or measure currents up to ?4ma with a lowest full-scale range of ??. integrated support circuitry facilitates use of an external buffer ampli- fier for current ranges greater than ?4ma. a voltage proportional to the measured output voltage or current is provided at the msr_ output. integrated comparators, with externally set voltage thresholds, provide detection for both voltage and current levels. the msr_ and comparator outputs can be placed in a high-impedance state. separate force and sense connections are short-circuit protected for voltages from (v ee - 0.3v) to (v cc + 0.3v). the force output also features a low-leakage, high-impedance state. integrated voltage clamps limit the force output to lev- els set externally. the force-current or the measure-cur- rent voltage can be offset -0.2v to +4.4v (ios). this feature allows for the centering of the control or mea- sured signal within the external dac or adc range. the max9951d/max9952d feature an integrated 10k ? force-sense resistor between force_ and sense_. the max9951f/max9952f have no internal force-sense resistor. these devices are available in a 64-pin, 10mm x 10mm, 0.5mm pitch tqfp package with an exposed 8mm x 8mm die pad on the top (max9951) or the bot- tom (max9952) of the package for efficient heat removal. the exposed pad is internally connected to v ee . the max9951/max9952 are specified over the commercial 0? to +70? temperature range. applications memory testers vlsi testers system-on-a-chip testers structural testers features ? force voltage/measure current (fvmi) ? force current/measure voltage (fimv) ? force voltage/measure voltage (fvmv) ? force current/measure current (fimi) ? force nothing/measure voltage (fnmv) ? force nothing/measure current (fnmi, range e only) ? termination/measure current ? termination/measure voltage ? five programmable current ranges 2a 20a 200a 2ma 64ma ? -2v to +7v through -7v to +13v input-voltage range ? force-current/measure-current adjustable- voltage offset (ios) ? programmable voltage clamps at force output ? low-leakage, high-impedance measure, and force states ? 3-wire serial interface ? low 6ma (max) quiescent current per pmu max9951/max9952 dual per-pin parametric measurement units ________________________________________________________________ maxim integrated products 1 ordering information 19-3247; rev 1; 2/05 for pricing, delivery, and ordering information, please contact maxim/dallas direct! at 1-888-629-4642, or visit maxim? website at www.maxim-ic.com. * future product?ontact factory for availability. pin configurations appear at end of data sheet. part temp range pin-package max9951 dccb 0? to +70? 64 tqfp-epr max9951fccb* 0? to +70? 64 tqfp-epr max9952 dccb 0? to +70? 64 tqfp-ep max9952fccb* 0? to +70? 64 tqfp-ep selector guide part description MAX9951DCCB internal 10k ? force-sense resistor max9951fccb external force-sense resistor max9952dccb internal 10k ? force-sense resistor max9952fccb external force-sense resistor
max9951/max9952 dual per-pin parametric measurement units 2 _______________________________________________________________________________________ absolute maximum ratings dc electrical characteristics (v cc = +12v, v ee = -7v, v l = +3.3v, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1) stresses beyond those listed under ?bsolute maximum ratings?may cause permanent damage to the device. these are stress rating s only, and functional operation of the device at these or any other conditions beyond those indicated in the operational sections of the specificatio ns is not implied. exposure to absolute maximum rating conditions for extended periods may affect device reliability. v cc to agnd .......................................................................+20v v ee to agnd.........................................................................-15v v cc to v ee ...........................................................................+32v v l to agnd............................................................................+6v agnd to dgnd.....................................................-0.5v to +0.5v digital inputs/outputs ..................................-0.3v to (v l + 0.3v) all other pins to agnd ....................(v ee - 0.3v) to (v cc + 0.3v) continuous power dissipation (t a = +70?) max9951_ccb (derate 43.5mw/? above +70?) .....3478mw max9952_ccb (derate 125mw/? above +70?) ...10,000mw ja max9951_ccb .........................................................+8?/w jc max9951_ccb .........................................................+2?/w ja max9952_ccb .......................................................+23?/w jc max9952_ccb .........................................................+8?/w junction temperature ......................................................+150? storage temperature range .............................-65? to +150? operating temperature range (commercial) ........0? to +70? lead temperature (soldering 10s) ..................................+300? parameter symbol conditions min typ max units force voltage force input voltage range v in0_ , v in1_ v ee + 2.5 v c c - 2.5 v v c c = +12v, v ee = -7v -2 +7 dut current at full scale v c c = + 18v , v e e = - 12v -7 +13 forced voltage v dut dut current = 0 v ee + 2.5 v c c - 2.5 v input bias current ? ? forced-voltage offset v fos -25 +25 mv forced-voltage-offset temperature coefficient ?00 ?/? forced-voltage gain error v fge nominal gain of +1 -1 0.005 +1 % forced-voltage-gain temperature coefficient ?0 ppm/? forced-voltage linearity error v fler gain and offset errors calibrated out (notes 2, 3) -0.02 +0.02 %fsr measure current measure-current offset i mos (note 2) -1 +1 %fsr measure-current-offset temperature coefficient 20 ppm/?c measure-current gain error i mge (note 4) -1 +1 % measure-current-gain temperature coefficient 20 ppm/?c linearity error i mler gain and offset errors calibrated out (notes 2, 3, 5) -0.02 +0.02 %fsr
max9951/max9952 dual per-pin parametric measurement units _______________________________________________________________________________________ 3 parameter symbol conditions min typ max units v ios_ = v dutgnd -4 +4 measure-output-voltage range over full-current range v msr v ios_ = 4v + v dutgnd 0+8 v current-sense amp offset-voltage input v ios relative to v dutgnd -0.2 +4.4 v rejection of output- measure error due to common-mode sense voltage c m v r l e r (notes 4 and 6) +0.001 +0.007 %fsr/v range e, r_e = 500k ? -2 +2 range d, r_d = 50k ? -20 +20 range c, r_c = 5k ? -200 +200 ? range b, r_b = 500 ? -2 +2 measure-current range range a, r_a = 15.6 ? -64 +64 ma force current v ios_ = v dutgnd -4 +4 input voltage range for setting forced current over full range v in0_, v in1_ v ios_ = 4v + v dutgnd 0+8 v current-sense amp offset-voltage input v ios relative to v dutgnd -0.2 +4.4 v ios_ input bias current ? ? forced-current offset (note 2) -1 +1 %fsr forced-current-offset temperature coefficient ?0 ppm/? forced-current gain error (note 4) -1 +1 % forced-current-gain temperature coefficient ?0 ppm/? forced-current linearity error i fler gain and offset errors calibrated out (notes 2, 3, 5) -0.02 +0.02 %fsr rejection of output error due to common-mode load voltage cmri oer (notes 4 and 6) +0.001 +0.007 %fsr/v range e, r_e = 500k ? -2 +2 range d, r_d = 50k ? -20 +20 range c, r_c = 5k ? -200 +200 ? range b, r_b = 500 ? -2 +2 forced-current range range a, r_a = 15.6 ? -64 +64 ma dc electrical characteristics (continued) (v cc = +12v, v ee = -7v, v l = +3.3v, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1)
max9951/max9952 dual per-pin parametric measurement units 4 _______________________________________________________________________________________ parameter symbol conditions min typ max units measure voltage measure-voltage-offset v mos -25 +25 mv measure-voltage-offset temperature coefficient ?00 ?/? gain error v mger nominal gain of +1 -1 ?.005 +1 % measure-voltage-gain temperature coefficient ?0 ppm/? measure-voltage linearity error v mler gain and offset errors calibrated out (notes 2, 3, 5) -0.02 +0.02 %fsr v c c = +12v, v ee = -7v -2 +7 dut current at full scale v c c = + 18v , v e e = - 12v -7 +13 measure-output-voltage range over full dut voltage v msr dut current = 0 v ee + 2.5 v c c - 2.5 v force output off-state leakage current -1 +1 na i lim- -92 -65 short-circuit current limit i lim+ +65 +92 ma force-to-sense resistor r fs d option only 8 10 12 k ? sense input input voltage range v ee + 2.5 v c c - 2.5 v leakage current f option only -1 +1 na comparator inputs input voltage range v ee + 2.5 v c c - 2.5 v offset voltage -25 +25 mv input bias current ? ? voltage clamps input control voltage v cllo_ , v clhi_ v ee + 2.4 v c c - 2.4 v clamp voltage accuracy (note 7) -100 +100 mv digital inputs v l = 5v +3.5 v l = 3.3v +2.0 input high voltage (note 8) v ih v l = 2.5v +1.7 v v l = 5v or 3.3v +0.8 input low voltage (note 8) v il v l = 2.5v +0.7 v input current i in ? ? input capacitance c in 3.0 pf dc electrical characteristics (continued) (v cc = +12v, v ee = -7v, v l = +3.3v, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1)
max9951/max9952 dual per-pin parametric measurement units _______________________________________________________________________________________ 5 parameter symbol conditions min typ max units comparator outputs output high voltage v oh v l = +2.375v to +5.5v, r pup = 1k ? v l - 0.2 v output low voltage v ol v l = +2.375v to +5.5v, r pup = 1k ? digital outputs output high voltage v oh i out = 1ma, v l = +2.375v to +5.5v, relative to dgnd v l - 0.25 v output low voltage v ol i out = -1ma, v l = +2.375v to +5.5v, relative to dgnd +0.2 v power supply positive supply v cc (note 1) +10 +12 +18 v negative supply v ee (note 1) -15 -7 -5 v total supply voltage v cc - v ee (note 9) +30 v logic supply v l +2.375 +5.5 v positive supply current i cc no load, clamps enabled 10.0 ma negative supply current i ee no load, clamps enabled 10.0 ma logic supply current i l no load, all digital inputs at rails 1.2 ma analog ground current i agnd no load, clamps enabled 0.9 ma digital ground current i dgnd no load, all digital inputs at rails 1.4 ma 1mhz, measured at force output 20 power-supply rejection ratio psrr 60hz, measured at force output 85 db dc electrical characteristics (continued) (v cc = +12v, v ee = -7v, v l = +3.3v, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1)
max9951/max9952 dual per-pin parametric measurement units 6 _______________________________________________________________________________________ ac electrical characteristics (v cc = +12v, v ee = -7v, v l = +3.3v, c cm = 120pf, c l = 100pf, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1) parameter symbol conditions min typ max units force voltage (notes 10, 11) range e, r_e = 500k ? 150 range d, r_d = 50k ? 50 range c, r_c = 5k ? 20 30 range b, r_b = 500 ? 20 settling time range a, r_a = 15.6 ? 25 ? force voltage/measure current (notes 10, 11) range e, r_e = 500k ? 500 range d, r_d = 50k ? 100 range c, r_c = 5k ? 30 55 range b, r_b = 500 ? 25 settling time range a, r_a = 15.6 ? 25 ? range change switching in addition to force-voltage and measure-current settling times, range a to range b, r_a = 15.6 ? , r_b = 500 ? 12 ? force current/measure voltage (notes 10, 11) range e, r_e = 500k ? 2500 range d, r_d = 50k ? 350 range c, r_c = 5k ? 30 60 range b, r_b = 500 ? 25 settling time range a, r_a = 15.6 ? 25 ? range change switching in addition to force-current and measure-voltage settling times, range a to range b, r_a = 15.6 ? , r_b = 500 ? 12 ? sense input to measure output path propagation delay c lmsr = 100pf 0.2 ? measure output maximum stable load capacitance 1000 pf comparators (c lcomp = 20pf, r pup = 1k ? ) propagation delay 50mv overdrive, 1v p-p , measured from input- threshold zero crossing to 50% of output voltage (note 12) 75 ns rise time 20% to 80% 60 ns fall time 80% to 20% 5 ns serial port (v l = +3.3v, c dout = 10pf) serial clock frequency f sclk (note 13) 20 mhz sclk pulse-width high t ch 12 ns sclk pulse-width low t cl 12 ns
max9951/max9952 dual per-pin parametric measurement units _______________________________________________________________________________________ 7 note 1: the device operates properly with different supply voltages with equally different voltage swings. note 2: interpret errors expressed in terms of %fsr (percent of full-scale range) as a percentage of the end-point-to-end-point range, i.e., for the ?4ma range, the full-scale range = 128ma, and a 1% error = 1.28ma. note 3: case must be maintained ?? for linearity specifications. note 4: tested in range c. note 5: current linearity specifications are maintained to within 700mv of the clamp voltages when the clamps are enabled. note 6: specified as the percent of full-scale range change at the output per volt change in the dut voltage. note 7: v cllo_ and v clhi_ should differ by at least 700mv. note 8: the digital interface accepts +5v, +3.3v, and +2.5v cmos logic levels. the voltage at v l adjusts the threshold. note 9: guaranteed by design. note 10: settling times are to 0.1% of fsr. cx_ = 60pf. note 11: all settling times are specified using a single compensation capacitor (cx_) across all current-sense resistors. use an indi- vidual capacitor across each sense resistor for better performance across all current ranges, particularly the lower ranges. note 12: the propagation delay time is only guaranteed over the force-voltage output range. propagation delay is measured by holding v sense_ steady and transitioning thmax_ or thmin_. note 13: maximum serial clock frequency may diminish at v l < +3.3v. ac electrical characteristics (continued) (v cc = +12v, v ee = -7v, v l = +3.3v, c cm = 120pf, c l = 100pf, t a = +25?, unless otherwise noted. specifications at t a = t min and t a = t max are guaranteed by design and characterization. typical values are at t a = +25?, unless otherwise noted.) (note 1) parameter symbol conditions min typ max units sclk fall to dout valid t do 22 ns cs low to sclk high setup t css0 10 ns sclk high to cs high hold t csh1 22 ns sclk high to cs low hold t csh0 0ns cs high to sclk high setup t css1 5ns din to sclk high setup t ds 10 ns din to sclk high hold t dh (note 12) 0 ns cs pulse-width high t cswh 10 ns cs pulse-width low t cswl 10 ns load pulse-width low t ldw 20 ns v dd high to cs low (power-up) (note 12) 500 ns
max9951/max9952 dual per-pin parametric measurement units 8 _______________________________________________________________________________________ t ypical operating characteristics (v cc = +12v, v ee = -7v, c l = 100pf, c cm_ = 120pf, c cx_ = 60pf, r l to +2.5v, range a: r_a = 15.6 ? , r l = 70.3 ? ; range b: r_b = 500 ? , r l = 2.25k ? ; range c: r_c = 5k ? , r l = 22.5k ? ; range d: r_d = 50k ? , r l = 225k ? ; range e: r_e = 500k ? , r l = 2.25m ? , t a = +25?.) transient response fvmi mode, ranges a, b, c max9551 toc01 20 s/div in_ 5v/div 0 force_ 5v/div 0 transient response fvmi mode, range d max9551 toc02 100 s/div in_ 5v/div 0 force_ 5v/div 0 transient response fvmi mode, range e max9551 toc03 1ms/div in_ 5v/div 0 force_ 5v/div 0 transient response fvmv mode, range c max9551 toc04 20 s/div in_ 5v/div 0 force_ 5v/div 0 transient response fimi mode, ranges a, b, c max9551 toc05 20 s/div in_ 5v/div 0 force_ 5v/div 0 transient response fimi mode, range d max9551 toc06 100 s/div in_ 5v/div 0 force_ 5v/div 0 transient response fimi mode, range e max9551 toc07 2ms/div in_ 5v/div 0 force_ 5v/div 0 transient response fimi mode, range c max9551 toc08 40 s/div in_ 5v/div 0 force_ 5v/div 0 ios vs. power supplies max9951 toc09 voltage (v) 20 -15 -10 -5 0 5 10 15 3.2 1.8 -0.2 -7 4.4 11.2 v ee v cc ios (max) ios (min)
max9951/max9952 dual per-pin parametric measurement units _______________________________________________________________________________________ 9 pin description pin max9951 max9952 name function 148 sensea pmu-a sense input. a kelvin connection to the dut. provides the feedback signal in fvmi mode and the measured signal in fimv mode for pmu-a. 247 forcea pmu-a driver output. forces a current or voltage to the dut for pmu-a. 346 cca pmu-a compensation capacitor connection. provides compensation for the pmu-a main amplifier. connect a 120pf capacitor from cca to ccoma. 5, 15, 34, 44 5, 15, 34, 44 v ee negative analog-supply input 4, 14, 35, 45 4, 14, 35, 45 v cc positive analog-supply input 643 ccoma common connection of cma and cxa for pmu-a 74 2 raas pmu-a range setting resistor-sense connection 84 1 raa pmu-a range a setting resistor connection 94 0 rab pmu-a range b setting resistor connection 10 39 rac pmu-a range c setting resistor connection 11 38 rad pmu-a range d setting resistor connection 12 37 rae pmu-a range e setting resistor connection 13 36 rax pmu-a current-range sense-resistor connection. connects to the external current range sense resistor for pmu-a. 16 33 extsela pmu-a external current-range selector. selects the external current range for pmu-a. 17 32 dutla pmu-a window comparator lower comparator output. a high output indicates that the sensed voltage at the window comparator is above v thmina . dutla is an open-drain output. 18 31 dutha pmu-a window comparator higher comparator output. a high output indicates that the sensed voltage at the window comparator is below v thmaxa . dutha is an open-drain output. 19 30 hi-za msra tri-state control input. a logic-low places msra in a high-impedance state. 20 29 insela input select pmu-a. insela is a logic input that selects between in0a and in1a. force insela low to select in0a. insela is nanded with control register bit inmodea. 21 28 temp temperature output. v temp = 10mv/?. t die (?) = (100)v temp - 273. 22 27 dgnd digital ground 23 26 v l logic-supply voltage input. the voltage applied at v l sets the upper logic-voltage level. 24 25 dout serial-data output. a standard spi-compatible output. data appears at dout msb first. 25 24 din serial-data input. load data into din msb first. 26 23 load serial-port load input. a logic-low asynchronously loads data from the input registers into the pmu registers. spi is a trademark of motorola, inc.
max9951/max9952 dual per-pin parametric measurement units 10 ______________________________________________________________________________________ pin description (continued) pin max9951 max9952 name function 27 22 sclk serial-clock input. sclk accepts external clock frequencies up to 20mhz. 28 21 cs chip-select input. force cs low to enable the serial interface. 29 20 inselb input select pmu-b. inselb is a logic input that selects between in0b and in1b. force inselb low to select in0b. inselb is nanded with control register bit inmodeb. 30 19 hi-zb msrb tri-state control input. a logic-low places msrb in a high-impedance state. 31 18 duthb pmu-b window comparator higher comparator output. a high output indicates that the sensed voltage at the window comparator is below v thmaxb . duthb is an open-drain output. 32 17 dutlb pmu-b window comparator lower comparator output. a high output indicates that the sensed voltage at the window comparator is above v thminb . dutlb is an open-drain output. 33 16 extselb pmu-b external current-range selector. selects the external current range for pmu-b. 36 13 rbx pmu-b current-range sense-resistor connection. connects to the external current-range sense resistor for pmu-b. 37 12 rbe pmu-b range e setting resistor connection 38 11 rbd pmu-b range d setting resistor connection 39 10 rbc pmu-b range c setting resistor connection 40 9 rbb pmu-b range b setting resistor connection 41 8 rba pmu-b range a setting resistor connection 42 7 rbas pmu-b range a setting resistor-sense connection 43 6 ccomb common connection of cmb and cxb for pmu-b 46 3 ccb pmu-b compensation capacitor connection. provides compensation for the pmu-b main amplifier. connect a 120pf capacitor from ccb to ccomb. 47 2 forceb pmu-b driver output. forces a current or voltage to the dut for pmu-b. 48 1 senseb pmu-b sense input. a kelvin connection to the dut. provides the feedback signal in fvmi mode and the measured signal in fimv mode for pmu-b. 49 64 thmaxb pmu-b window comparator upper threshold voltage input. sets the upper voltage threshold for the pmu-b window comparator. 50 63 thminb pmu-b window comparator lower threshold voltage input. sets the lower voltage threshold for the pmu-b window comparator. 51 62 clhib pmu-b upper-clamp voltage input. sets the upper-clamp voltage level. 52 61 cllob pmu-b lower-clamp voltage input. sets the lower-clamp voltage level. 53 60 in0b force-threshold current input for pmu-b. sets the forced voltage in fv mode or the forced current in fi mode. 54 59 in1b force-threshold voltage input for pmu-b. sets the forced voltage in fv mode or the forced current in fi mode
max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 11 pin description (continued) pin max9951 max9952 name function 55 58 msrb pmu-b measurement output. provides a voltage equal to the sense voltage in fimv mode, and provides a voltage proportional to the dut current in fvmi mode for pmu-b. force hi-zb low to place msrb in a high-impedance state. 56 57 agnd analog ground 57 56 ios offset-voltage input. sets an offset voltage for the internal current-sense amplifiers of both channels. 58 55 msra pmu-a measurement output. provides a voltage equal to the sense voltage in fimv mode, and provides a voltage proportional to the dut current in fvmi mode for pmu-a. force hi-za low to place msra in a high-impedance state. 59 54 in1a force-threshold voltage input for pmu-a. sets the forced voltage in fv mode or the forced current in fi mode. 60 53 in0a force-threshold current input for pmu-a. sets the forced voltage in fv mode or the forced current in fi mode. 61 52 clloa pmu-a lower-clamp voltage input. sets the lower-clamp voltage level. 62 51 clhia pmu-a upper-clamp voltage input. sets the upper-clamp voltage level. 63 50 thmina pmu-a window comparator lower threshold voltage input. sets the lower voltage threshold for the pmu-a window comparator. 64 49 thmaxa pmu-a window comparator upper threshold voltage input. sets the upper voltage threshold for the pmu-a window comparator.
max9951/max9952 dual per-pin parametric measurement units 12 ______________________________________________________________________________________ range resistor select in1_ in0_ insel_ force_ cllo_ clhi_ sense_ rs0_ rs1_ rs2_ cl enable_ f mode_ m mode_ in mode_ sclk 10 to other pmu channel to external current booster for highest range agnd v ee v l v cc v l r fs* serial interface 1 0 ios dgnd c x_ extsel_ r_x cm_ 1.5m ? 1.5m ? cc_ ccom_ dout din thmin_ thmax_ *r fs internal to max9951d/max9952d only hi-zmeas_ cs load msr_ hi-z_ duth_ dutl_ disable_ ra rb rc rd re r_a r_b r_c r_d r_e hi-zforce_ max9951 max9952 dgnd 1 0 1 0 functional diagram
detailed description the max9951/max9952 force or measure voltages in the -2v to +7v through -7v to +13v ranges, dependent upon the supply voltage range (v cc and v ee ). these devices also force or measure currents up to ?4ma, with a lowest full-scale range of ??. use an external buffer amplifier for current ranges greater than ?4ma. msr_ presents a voltage proportional to the measured voltage or current. place msr_ in a low-leakage, high- impedance state by forcing hi-z_ low. integrated com- parators with externally programmable voltage thresholds provide ?oo low?(dutl_) and ?oo high (duth_) voltage-monitoring outputs. each comparator output features a selectable high-impedance state. the devices feature separate force_ and sense_ con- nections and are fully protected against short circuits. the force_ output has two voltage clamps, negative (cllo_) and positive (clhi_), to limit the voltage to externally provided levels. two control-voltage inputs, selected independently of the pmu mode, allow for greater flexibility. serial interface the max9951/max9952 use a standard 3-wire spi/qspi/microwire-compatible serial port. once the input data register fills, the data becomes available at dout msb first. this data output allows for daisy-chaining multiple devices. figures 1, 2, and 3 show the serial interface timing diagrams. serial port operation the serial interface has two ranks (figure 4). each pmu has an input register that loads from the serial port shift register. each pmu also has a pmu register that loads from the input register. data does not affect the pmu until it reaches the pmu register. this register configura- tion permits loading of the pmu data into the input regis- ter at one time and then latching the input register data into the pmu register later, at which time the pmu func- tion changes accordingly. the register configuration also provides the ability to change the state of the pmu asyn- chronously, with respect to the loading of that pmu? data into the serial port. thus, the pmu easily updates simultaneously with other pmus or other devices. max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 13 first bit from previous write sclk din last bit from previous write input register(s) updated dout pmu registers updated load cs d0 d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13 d14 d15 q0 q1 q2 q3 q4 q5 q6 q7 q8 q9 q10 q11 q12 q13 q14 q15 figure 1. serial port timing with asynchronous load qspi is a trademark of motorola, inc. microwire is a trademark of national semiconductor corp.
max9951/max9952 dual per-pin parametric measurement units 14 ______________________________________________________________________________________ first bit from previous write sclk din last bit from previous write input and pmu register(s) updated dout load load = 0 cs d0 d1 d2 d3 d4 d5 d6 d7 d8 d9 d10 d11 d12 d13 d14 d15 q0 q1 q2 q3 q4 q5 q6 q7 q8 q9 q10 q11 q12 q13 q14 q15 figure 2. serial port timing with synchronous load t ldw sclk din d0 d1 d2 d3 d4 d5 d14 d15 t ch t cl t csso t csho t css1 t csh1 t dh t ds t cswh d0last d1last d2last d3last d4last d5last d14last d15last t do dout cs load figure 3. detailed serial port timing diagram
use load to asynchronously load all input registers into the pmu registers. if load remains low when data latches into an input register, the data also transfers to the pmu register. bit order the max9951/max9952 use the bit order, msb first in and first out, as shown in table 1. pmu control programming both pmus with the same data requires a 16-bit word. programming each pmu with separate data requires two 16-bit words. the address bits specify which input registers the shift- register loads. table 2 describes the function of the address bits. bits c1 and c2 specify how the data loads into the sec- ond rank pmu registers. these 2 control bits serve a similar function as the load input. the specified actions occur when cs goes high, whereas the load input loads the pmu register at anytime. when either c1 or c2 is low, the corresponding pmu register is transparent. table 3 describes the function of the 2 control bits. the nop operation requires a1 = a2 = c1 = c2 = 0. in this case, the data transfers through the shift register without changing the state of the device. max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 15 shift register /16 control decode input register a input register b pmu register a sclk din pmu register b dout load 12 12 to pmua 12 to pmub 12 12 4 cs figure 4. dual pmu serial port block diagram table 1. bit order bit bit name 15 (msb) inmode 14 fmode 13 mmode 12 rs2 11 rs1 10 rs0 9 clenable 8 hi-zforce 7 hi-zmsr 6 disable 5b2 4b1 3a2 2a1 1c2 0 (lsb) c1 table 2. address bit (bit 3) a2 (bit 2) a1 operation 00 do not update any input register (nop). 01 only update input register a. 10 only update input register b. 11 update both input registers with the same data. table 3. control bit (bit 1) c2 (bit 0) c1 operation 00 data stays in input register. 01 transfer pmu-a input register to pmu register. 10 transfer pmu-b input register to pmu register. 11 transfer both input registers to the pmu registers.
max9951/max9952 c1 = c2 = 0 allows for data transfer from the shift regis- ter to the input register without transferring data to the pmu register (unless load is low). this permits the latching of data into the pmu register at a later time by load or subsequent command. table 4 summarizes the possible control and address bit combinations. when asynchronously latching only one pmu? data, the input register of the other pmu maintains the same data. therefore, loading both pmu registers would update the one pmu with new data while the other pmu remains in its current state. mode selection four bits from the control word select between the vari- ous force-measure modes of operation. inmode selects between the two input analog control voltages. fmode selects whether the pmu forces a voltage or a current. mmode selects whether the dut current or dut voltage is directed to msr_. hi-zforce places the driver amplifier in a high-output-impedance state. table 5 describes the various force and measure modes of operation. dual per-pin parametric measurement units 16 ______________________________________________________________________________________ table 4. pmu operation using control and address bits bit (3:2) bit (1:0) a2 a1 c2 c1 pmu-a operation pmu-b operation 0000 nop: data just passes through 0001 transfer pmu register a from input register a. nop. 0010 nop. transfer pmu register b from input register b. 0011 transfer pmu register a from input register a. transfer pmu register b from input register b. 0100 transfer input register a from shift register. nop. 0101 transfer input register a and pmu register a from shift register. nop. 0110 transfer input register a from shift register. transfer pmu register b from input register b. 0111 transfer input register a and pmu register a from shift register. transfer pmu register b from input register b. 1000 nop. transfer input register b from shift register. 1001 transfer pmu register a from input register a. transfer input register b from shift register. 1010 nop. transfer input register b and pmu register b from shift register. 1011 transfer pmu register a from input register a. transfer input register b and pmu register b from shift register. 1100 transfer input register a from shift register. transfer input register b from shift register. 1101 transfer input register a and pmu register a from shift register. transfer input register b from shift register. 1110 transfer input register a from shift register. transfer input register b and pmu register b from shift register. 1111 transfer input register a and pmu register a from shift register. transfer input register b and pmu register b from shift register.
current-range selection three bits from the control word, rs0, rs1, and rs2, control the full-scale current range for either fi (force current) or mi (measure current). table 6 describes the full-scale current-range control. clamp enable the clenable bit enables the force-output-voltage clamps when high and disables the clamps when low. there is hysteresis equal to approximately 5% of the current range for clamp. measure output high-impedance control msr_ attains a low-leakage, high-impedance state by using the hi-zmsr control bit, or the hi-z_ input. hi-z_ is internally pulled up to v l with a 1.5m ? resistor. the 2 bits are logically anded together to control the msr_ output. hi-z_ allows external multiplexing among several pmu msr_ outputs without using the serial interface. table 7 explains the various output modes for the msr_ output. digital output (dout) the digital output follows the last output of the serial- shift register and clocks out on the falling edge of sclk. dout serially shifts the first bit of the incoming serial data word 16.5 clock cycles later. this allows for daisy-chaining additional devices using dout and the same clock. max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 17 table 5. pmu force-measure mode selection (bit 15) in mode* (bit 14) f mode (bit 13) m mode (bit 8) hi-zforce pmu mode force output measure output active input 001 1 fvmi voltage i dut v in0 101 1 fvmi voltage i dut v in1 000 1 fvmv voltage v dut v in0 100 1 fvmv voltage v dut v in1 011 1 fimi current i dut v in0 111 1 fimi current i dut v in1 010 1 fimv current v dut v in0 110 1 fimv current v dut v in1 x010 fnmi (range e only) high- impedance i dut x x0 00 fnmv high- impedance v dut x 010 0 termination voltage v dut v in0 110 0 termination voltage v dut v in1 011 0 termination voltage i dut v in0 111 0 termination voltage i dut v in1 * insel = 0 table 6. current-range selection (bit 12) rs2 (bit 11) rs1 (bit 10) rs0 range nominal resistor value ( ? ) 00x ?? r_e = 500k 010 ?0? r_d = 50k 011 ?00? r_c = 5k 100 ?ma r_b = 500 1x1 ?4ma r_a = 15.6 110 external table 7. msr_ output truth table (bit 7) hi-zmsr hi-z_ msr_ 11 measure output enabled 01 high-impedance 10 high-impedance 00 high-impedance
max9951/max9952 ?uick load?using chip select if cs goes low and then returns high without any clock activity, the data from the input registers latch into the pmu registers. this extra function is not standard for spi/qspi/microwire interfaces. the quick load mim- ics the function of load without forcing load low. comparators two comparators configured as a window comparator monitor msr_. thmax_ and thmin_ set the high and low thresholds that determine the window. both out- puts are open drain and share a single disable control that places the outputs in a high-impedance, low-leak- age state. table 8 describes the comparator output states of the max9951/max9952. applications information in force-voltage (fv) mode, the voltage at force_ is directly proportional to the input control voltage. in force-current (fi) mode, the current flowing out of force_ is proportional to the input control voltage. positive current flows out of the pmu. in force-nothing (fn) mode, force_ is high impedance. in measure-current (mi) mode, the voltage at msr_ is directly proportional to the current exiting force_. positive current flows out of the pmu. in measure-voltage (mv) mode, the voltage at msr_ is directly proportional to the voltage at sense_. current-sense-amplifier offset-voltage input ios is a buffered input to the current-sense amplifiers. the current-sense amplifiers convert the input control voltage (in0_ or in1_) to the forced dut current (fi), and convert the sensed dut current to the msr_ out- put voltage (mi). when ios equals zero relative to dutgnd (the gnd voltage at the dut, which the level- setting dacs and the adc are presumed to use as a ground reference), the nominal voltage range that cor- responds to ?ull-scale current is -4v to +4v. any volt- age applied to ios adds directly to this control input/measure output voltage range, i.e., applying +4v to ios forces the voltage range that corresponds to ?ull-scale current from 0 to +8v. the following equations determine the minimum and maximum currents for each current range correspond- ing to the input voltage or measure voltage: v maxcurrent = v ios + 4v v mincurrent = v ios - 4v choose ios so the limits of msr_ do not go closer than 2.8v to either v ee or v cc . for example, with supplies of +10v and -5v, limit the msr_ output to -2.2v and +7.2v. therefore, set ios between +1.8v and +3.2v. msr_ could clip if ios is not within this range. use these general equations for the limits on ios: minimum v ios = v ee + 6.8v maximum v ios = v cc - 6.8v current booster for highest current range an external buffer amplifier can be used to provide a current range greater than the max9951/max9952 maximum ?4ma output current (figure 5). this func- tion operates as follows: dual per-pin parametric measurement units 18 ______________________________________________________________________________________ table 8. comparator truth table (bit 6) disable condition duth dutl 0x high-z high-z 1 v msr > v thmax and v thmin 01 1 v thmax > v msr > v thmin 11 1 v thmax and v thmin > v msr 10 1 v thmin > v msr > v thmax * 00 * v thmax > v thmin constitutes normal operation. this condition, however, has v thmin > v thmax and does not cause any prob- lems with the operation of the comparators. max9951 max9952 main amp current- sense amp ccom_ extsel_ force_ sense_ pmu dut r ext ra re r_x r_a r_e 50 ? vin_ msr_ x 4 figure 5. external current boost
a digital output decoded from the range select bits, extsel_, indicates when to activate the booster. ccom_ serves as an input to an external buffer through an internal 50 ? current-limit series resistor. connect the external buffer output to the external current-sense resis- tor, r ext , and to r_x. connect the other side of r_x to force_. ensure that the external switch is low leakage. voltage clamps the voltage clamps limit force_ and operate over the entire specified current range. set the clamp voltages externally at clhi_ and cllo_. the voltage at force_ triggers the clamps independent of the voltage at sense_. when enabled, the clamps function in fi mode only. use clamp voltages of 0.7v above and below the force_ voltage range to ensure proper operation of the pmu. current limit the force_ current-limiting circuitry, 92ma (maximum), ensures a well-behaved msr_ output for currents between the full current range and the current limits. for currents greater than the full-scale current, the msr_ voltage is greater than +4v, and for currents less than the full-scale current, the msr_ voltage is less than -4v. additionally, serial interface bit b2 enables a range-sen- sitive current limit of 2.5 times the nominal current range. table 9 shows the current-limit operation. independent control of the feedback switch and the measure switch two single-pole-double-throw (spdt) switches deter- mine the mode of operation of the pmu. one switch determines whether the sensed dut current or dut voltage feeds back to the input, and thus determines whether the max9951/max9952 force current or volt- age. the other switch determines whether msr_ sens- es the dut current or dut voltage. independent control of these switches and the hi- zforce state permits flexible modes of operation beyond the traditional force-voltage/measure-current (fvmi) and force-current/measure-voltage (fimv) modes. the max9951/max9952 support the following eight modes: ? fvmi fimv fvmv fimi fnmv fnmi (range e only) terminate/measure v terminate/measure i figure 6 shows the internal path structure for force-volt- age/measure-current mode. in force-voltage/measure- current mode, the current across the appropriate external sense resistor (r_a to r_e) provides a voltage at msr_. sense_ samples the voltage at the dut and feeds the buffered result back to the negative input of the voltage amplifier. the voltage at msr_ is propor- tional to the force_ current in accordance with the fol- lowing formula: v msr_ = i force_ x r sense x 4 figure 7 shows the internal path structure for the force- current/measure-voltage mode. in force-current/mea- sure-voltage mode, the appropriate external sense resistor (r_a to r_e) provides a feedback voltage to max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 19 table 9. current limit fmode range b2 (bit 5) current limit x any 0 65ma to 92ma 0a 1 65ma to 92ma 0b1 5ma 0c 1 500? 0d 1 50? 0e1 5? in1_ a v = +4 dut dutgnd msr_ force_ sense_ r sense figure 6. force-voltage/measure-current functional diagram
max9951/max9952 the inverting input of the voltage amplifier. sense_ samples the voltage at the dut and provides a buffered result at msr_. high-impedance states the force_, msr_, and comparator outputs feature individual high-impedance control that places them into a high-impedance, low-leakage state. the high-imped- ance state allows busing of msr_ and comparator out- puts with other pmu measure and comparator outputs. the force_ output high-impedance state allows for additional modes of operation as described in table 5 and can eliminate the need for a series relay in some applications. the force_, msr_, and comparator outputs power up in the high-impedance state. input source selection either one of two input signals, in0_ or in1_, can con- trol both the forced voltage and the forced current. in this case, the two input signals represent alternate forc- ing values that can be selected either with the serial interface or insel_. alternatively, each input signal can be dedicated to control a single forcing function (i.e., voltage or current). short-circuit protection force_ and sense_ input can withstand a short to any voltage between the supply rails. mode and range change transients the max9951/max9952 feature make-before-break switching to minimize glitches. the integrated voltage clamps also reduce glitching at the output. dut voltage swing vs. dut current and power-supply voltages several factors limit the actual dut voltage that the pmu delivers: ? the overhead required by the device amplifiers and other integrated circuitry; this is typically 2.5v from each rail independent of load. ? the voltage drop across the current-range select resistor and internal circuitry in series with the sense resistor. at full current, the combined voltage drop is typically 2.5v. ? variations in the power supplies. ? variation of dut ground vs. pmu ground. neglecting the effects of the third and fourth items, figure 8 demonstrates the force-output capabilities of the pmu. for zero dut current, the dut voltage swings from (v ee + 2.5v) to (v cc - 2.5v). for larger positive dut currents, the positive swing drops off linearly until it reaches (v cc - 5v) at full current. similarly, for larger negative dut currents, the negative voltage swing drops off linearly until it reaches (v ee + 5v) at full current. dual per-pin parametric measurement units 20 ______________________________________________________________________________________ in1_ msr_ a v = +4 dut dutgnd force_ sense_ r sense figure 7. force-current/measure-voltage functional diagram i dut_ v dut_ i min i max v ee + 5v v ee + 2.5v v cc - 5v v cc - 2.5v figure 8. pmu force-output capability
ground, dut ground, and ios the max9951/max9952 utilize two local grounds, agnd (analog ground) and dgnd (digital ground). connect agnd and dgnd together on the pc board. in a typical ate system, the pmu force voltage is rela- tive to dut ground. in this case, reference the input voltages in0_ and in1_ to dut ground. similarly, refer- ence ios to dut ground. if it is not desired to offset the current control and measure voltages, connect ios to dut ground potential. reference the msr_ output to dut ground. settling times and compensation capacitors the data in the electrical characteristics table reflects the circuit shown in the functional diagram that includes a single compensation capacitor (cx_) effec- tively across all the sense resistors. placing individual capacitors, cra, crb, crc, crd, and cre directly across the sense resistors, r_a, r_b, r_c, r_d, and r_e, independently optimizes each range. the combination of the capacitance across the sense resistors, along with the main amplifier compensation comparator, cm_, ensures stability into the maximum expected load capacitance while optimizing settling time for a given load. digital inputs (sclk, din, cs , and load ) the digital inputs incorporate hysteresis to mitigate issues with noise, as well as provide for compatibility with opto-isolators that can have slow edges. temperature monitor each device supplies a single temperature output signal, temp, that asserts a nominal output voltage of 2.98v at a die temperature of +25? (298k). the output voltage increases proportionately with temperature at a rate of 10mv/?. the temperature sensor output impedance is 15k ? (typ). determine the die temperature using: t die = (100) x v temp - 273 [?] max9951/max9952 dual per-pin parametric measurement units ______________________________________________________________________________________ 21 chip information transistor count: 11,000 process: bicmos
max9951/max9952 dual per-pin parametric measurement units 22 ______________________________________________________________________________________ forceb rbe rbx v cc senseb rbd rbc rbb rba rbas ccomb v ee v cc ccb v ee extselb thmaxa sensea rae rax v cc forcea rad rac rab raa raas ccoma v ee v cc cca v ee extsela tqfp-epr hi-za dout sclk insela din thmina clhia clloa in0a in1a msra ios agnd msrb in1b in0b cllob clhib thminb thmaxb v l load cs 16 15 14 13 12 11 10 9 8 7 5 6 3 4 2 1 24 28 26 27 25 19 23 22 21 20 18 17 31 32 30 29 53 49 50 51 52 58 54 55 56 57 63 59 60 61 62 64 33 34 35 36 37 38 39 40 41 42 43 44 46 45 47 48 dutla dutha temp top view dgnd inselb hi-zb duthb dutlb max9951 pin configurations
max9951/max9952 dual per-pin parametric measurement units maxim cannot assume responsibility for use of any circuitry other than circuitry entirely embodied in a maxim product. no circu it patent licenses are implied. maxim reserves the right to change the circuitry and specifications without notice at any time. maxim integrated products, 120 san gabriel drive, sunnyvale, ca 94086 408-737-7600 ____________________ 23 2005 maxim integrated products printed usa is a registered trademark of maxim integrated products, inc. package information for the latest package outline information, go to www.maxim-ic.com/packages . forcea rae rax v cc sensea rad rac rab raa raas ccoma v ee v cc cca v ee extsela thmaxb senseb rbe rbx v cc forceb rbd rbc rbb rba rbas ccomb v ee v cc ccb v ee extselb hi-zb din dgnd inselb dout thminb clhib cllob in0b in1b msrb agnd ios msra in1a in0a clloa clhia thmina thmaxa load v l temp 16 15 14 13 12 11 10 9 8 7 5 6 3 4 2 1 24 28 26 27 25 19 23 22 21 20 18 17 31 32 30 29 53 49 50 51 52 58 54 55 56 57 63 59 60 61 62 64 33 34 35 36 37 38 39 40 41 42 43 44 46 45 47 48 dutlb duthb cs sclk insela hi-za dutha dutla top view max9952 tqfp-ep pin configurations (continued)

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